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News Release from: Coherent | Subject: ExciStar XS excimer laser
Edited by the Laboratorytalk Editorial
Team on 26 July 2006
Compact Excimer Laser Offers High
Performanced
The new ExciStar XS from Coherent, is a compact, economical excimer laser that offers exceptional performance and lifetime characteristics.
The new ExciStar XS from Coherent, is a compact, economical excimer laser that offers exceptional performance and lifetime characteristics Specifically, the air cooled ExciStar XS measures only 649 x 300 x 400 mm, yet delivers up to 10mJ/pulse at 193 nm with an energy stability of <2% at repetition rates of up to 500 Hz
The use of Almeta XS all metal tube construction, corona preionisation, an all solid state pulser and electrostatic dust removal combine to yield a laser tube lifetime of 500 million pulses and an optics lifetime of 100 million pulses.
The ExciStar XS can operate at 157 nm (F2), 193 nm (ArF), 248 nm (KrF), or 351 nm (XeF).
Its compact size and low total cost of ownership will make the ExciStar XS particularly attractive to laboratory and research users, especially for marking applications.
In addition, the ExciStar XS is RoHS compliant.
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