Excimer promises simple installation and operation

A Coherent product story
Edited by the Laboratorytalk editorial team Sep 7, 2007

This design of the Xantos XS self-contained excimer laser enables automated gas re-filling without external gas and vacuum lines, and meets all international gas handling and safety standards

Coherent introduces the Xantos XS, a self-contained excimer laser that features dramatically simplified installation.

Specifically, this new excimer laser contains an internal gas compartment, consisting of a pre-mixed laser gas bottle and all necessary gas supply equipment for laser operation.

In addition, the Xantos XS operates from a single-phase power source and requires no water cooling, making it a plug-and-play laser that can be easily installed and/or simply moved to a new location without the need for a specialised support infrastructure.

The laser is available at all fluoride wavelengths - 157nm, 193nm, 248nm, and 351nm - and delivers moderate pulse energies at repetition rates up to 500Hz.

These characteristics make the Xantos XS ideal for both scientific and precision industrial applications, says Coherent.

Based on the field-proven ExciStar XS laser, this unique, self-contained laser also features long tube lifetime, high reliability, and long gas lifetimes, which result from its Almeta all metal-ceramic tube technology.

These features lead directly into a very low cost of ownership, in addition to greater flexibility and improved ease of use.

With a beam cross-section of 6x3mm and excellent beam uniformity, the laser output can be easily utilised in a wide range of scientific and industrial applications.

The concept of an integrated gas compartment is a unique feature in the excimer laser market and makes laser operation as flexible as possible.

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