Product category:
Electron microscopy systems
News Release from: Hitachi High-Technologies | Subject: S-3400N
Edited by the Laboratorytalk Editorial
Team on 23 May 2005
Five-segment BSD for variable pressure
SEM
High sensitivity allows smaller spot sizes and beam currents to be used in BSD imaging leading to improved resolution and lower risk of beam damage on delicate, uncoated specimens
A five-segment semiconductor backscattered electron detector (BSD) with high sensitivity and fast response rates has been introduced for the S-3400N variable pressure scanning electron microscope (SEM) from Hitachi High-Technologies The detector can be used for both variable pressure and high vacuum imaging
This article was originally published on Laboratorytalk on 12 Oct 2004 at 8.00am (UK)
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The recently-launched S-3400N variable pressure scanning electron microscope from Hitachi High-Technologies has improved display and signal mixing facilities for greater versatility of operation.
This new detector is said to give exceptional sensitivity, especially at low accelerating voltages.
The high sensitivity allows smaller spot sizes and beam currents to be used in BSD imaging leading to improved resolution and lower risk of beam damage on delicate, uncoated specimens.
The detector also works at TV scan rates, making it easier to find the required field of view.
The detector features five independently selectable segments, instead of the four found on conventional multi-segment detectors.
Selection of the appropriate combinations of segments allows this versatile detector to be switched between a number of different imaging modes.
This not only gives the traditional topographic and atomic number contrast imaging modes associated with backscattered electron imaging, but the fifth segment allows the detector to produce 3D images as well.
The S-3400N is the latest addition to the Hitachi range of variable pressure scanning electron microscopes.
To the versatility of variable pressure imaging is added an extremely large specimen chamber.
This not only accommodates samples of up to 80mm thickness at the analysis position, but also allows the simultaneous mounting of an energy dispersive X-ray (EDX) and wavelength dispersive X-ray (WDX) spectrometers for comprehensive elemental analysis.
The S-3400N also features a unique automatic beam alignment system, designed to give perfect focus whatever the operating conditions.
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