Phase modulated spectroscopic ellipsometry

Edited by the Laboratorytalk editorial team Apr 22, 2004

Thickness determinations from a few angstroms to tens of microns are possible for complex structures found in semiconductor, optical coating, polymer film and biological applications

The Uvisel spectroscopic phase modulated ellipsometer from Jobin Yvon allows the accurate characterisation of thickness and refractive index for single and multiple layer thin film structures.

Thickness determinations from a few angstroms to tens of microns are possible for complex structures found in semiconductor, flat panel display, optical coating, polymer film and biological applications.

The Uvisel ellipsometer is said to deliver the highest combination of measurement precision, accuracy and ease-of-use for demanding research and industrial quality control.

The unique features of the instrument include a wide spectral range from 190 to 2100nm, integrated microspot optics and turnkey software package for automatic operation.

A large variety of accessories are available to match the instrument to the needs of the application.

The Uvisel ellipsometer delivers unprecedented versatility and flexibility and functionality and is recognised to be the gold standard for thin film characterisation, says Jobin Yvon.