KNF Flodos pumps used for semiconductor technology

Liquiport pumps from KNF Flodos are being used by a leading provider of lithography systems to develop instruments for the fabrication of state-of-the-art chips and integrated circuits

12 Liquiport pumps are used in the company's testing laboratory for the development of lithography technology that uses a laser to etch the surface of silicon disc wafers on a nanometre scale.

An immersion liquid is used between the wafer and the lens to enhance the laser's depth of focus and improve resolution and this effect can be simulated in tests using the Liquiport pumps to transfer liquids from one chamber to another.

For this, and all applications, the versatile Liquiport pumps are very reliable.

Based on diaphragm pump technology, Liquiport pumps are ideal for transferring almost any laboratory liquids and are maintenance free, with extremely quiet functioning and a unique, compact, stand-alone design.

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