Lext OLS4000 resolves 6nm step-height feature

The Olympus Lext OLS4000 has been selected by the PTB for use in a joint project that aims to develop an assistance system for confocal and interferential microscope users.

The PTB is Germany's national metrology institute.

The Lext OLS4000 will provide measurements for the Optassyt project to check the specifications of standards and measurement procedures.

At the launch event, the instrument demonstrated its capabilities by resolving a 6nm step-height feature - exceeding its design specification of 10nm.

The Optassyt project aims to develop a software-based user-friendly assistance system for three-dimensional optical geometry recording on technical surfaces.

In co-operation with industry and university partners, the PTB is developing a system that will aid in instrument set-up, use of advanced signal processing and the application of calibration strategies and characteristic 3D variables, helping users to improve their understanding of topographic measurements.

By using the Lext OLS4000 as a representative for confocal laser scanning microscopes in this project, resolution and measuring uncertainties of features on surface topography standards will be determined.

With its good X/Y and Z performance, the Lext OLS4000 is said to provide a powerful way to research and characterise these standards.

The tool will therefore enable users to accurately interpret measurement results.

Back to top