Single-probe capacitive gauge for nanometrology

These single-probe nanometrology sensors combine superior resolution and linearity with very high bandwidth for dynamic measurements

PI (Physik Instrumente) introduces the D-510 family of PISeca capacitive displacement gauges.

PISeca capacitance gauges perform high-precision, non-contact measurements of geometric quantities representing displacement, separation, position, length or other linear dimension against any kind of electrically conductive target.

These single-probe nanometrology sensors combine superior resolution and linearity with very high bandwidth for dynamic measurements.

Features and advantages.

Absolute, non-contact measurement of distance / motion / vibration.

Sub-nanometer resolution, measuring ranges to 500um.

Excellent measuring linearity to 0.1%.

Plug and play: easy setup and integration.

Very temperature stable.

Bandwidth to 10kHz.

Proprietary electrode design and electronics provide higher linearity.

All systems factory calibrated for highest possible linearity / accuracy.

Higher linearity through guard-ring capacitor and ILS electronics.

Not all capacitive sensors are created equal.

Because the sensor design has a strong influence on the linearity, PI uses a special guard-ring electrode to shield the sensor electrode from boundary effects.

This ensures a homogeneous electric field in the measurement zone and results in higher measuring linearity.

In addition, the E-852 sensor signal conditioning electronics are equipped with the PI proprietary ILS linearization circuit.

Easy setup and installation.

The capacitive gauges are plug and play units.

The cable plugs directly into the sensor head for easy installation or replacement in the field.

Installation is further facilitated by a display in the sensor electronics that indicates the optimum distance between probe and target.

Multichannel measurements, closed loop motion control electronics.

PISeca capacitive sensor systems can be operated in multichannel configurations and combined with nanopositioning actuators for nanometer precise closed-loop motion control applications.

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