Nanometer precision for QA applications

PI (Physik Instrumente) has extended its PIHera family of compact X, XY and Z flexure-guided piezo nanopositioning tables, now offering record travel ranges to 1.8mm

These precision closed-loop flexure-guided stages can be used for scanning probe applications (surface metrology) and static positioning.

Most PIHera stages provide sub-nanometer resolution and even the 1.8mm versions achieve 3nm resolution in closed-loop operation.

The compact size is achieved with a new, friction-free and extremely stiff flexure system, which also provides fast response and excellent guiding accuracy.

Trajectory precision is in the low-nanometer range.

High acceleration forces are provided by patented, long-life multilayer piezoelectric linear actuators.

The ability to control motion with millisecond responsiveness and nanometer precision over long travel ranges makes PIHera stages ideal for measuring and QA applications.

Capacitive feedback offers greater motion linearity.

The stages are equipped with non-contact capacitive-sensors and reduce motion linearity errors to 0.02% with effective resolution in the sub-nanometer range.

PI capacitive sensors are absolute-measuring, direct-metrology devices that boast very high bandwidth and exhibit no periodic errors.

Typical applications include scanning probe microscopy, biotechnology, surface metrology, quality assurance, nanometrology, interferometry, nanopositioning, and semiconductor technology.

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