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Product category: Particle size analysis equipment
News Release from: Quantachrome Instruments | Subject: Autosorb-1MP
Edited by the Laboratorytalk Editorial Team on 10 February 2006

Measuring pore size in thin-film low-k
dielectrics

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Quantachrome Instruments announces a new method for determining pore size and pore volume distribution in thin-film low-k dielectrics.

The new method for determining pore size and pore volume distribution in thin-film low-k dielectrics overcomes the costs usually associated with previously applied techniques such as small angle x-ray and neutron scattering (Saxs and Sans), electron microscopy and NMR-methods A new, yet simple, approach takes advantage both of the extreme sensitivity of Quantachrome's gas adsorption instrument (Autosorb-1MP) to measure a sample's behavior of cryogenic krypton gas adsorption, and state-of-the-art density functional theory calculations to create a calibration database

A whitepaper describing the development of the method is available.

Quantachrome expects this method to be widely adopted since it can be used with instruments already in use.

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