Superior approach to monitoring cleanroom air

A Tiger Optics product story

Edited by the Laboratorytalk editorial team Jul 14, 2008

Tiger-i provides a superior approach to monitoring cleanroom ambient air for gas phase airborne molecular contaminants (AMCs) that increasingly compromise manufacturing process quality and yield

Tiger Optics announced at Semicon West 2008 the launch of its flagship product for cleanroom applications, the Tiger-i.

The Tiger-i line employs Tiger Optics' exclusively patented continuous wave cavity ring-down spectroscopy (CW-CRDS).

The Tiger-i line measures into parts per trillion (ppt) levels of trace hydrofluoride (HF) and hydrochloride (HCl) gases, which combined with ammonia or amines, can lead to contamination and overall quality breakdown.

The built-in reference cell and automated tune function of the Tiger-i provides 99.9 percent uptime without calibration, consumables or maintenance.

By enabling manufacturers to quickly and reliably correlate events, such as tool issues, chemical spills, material outgassing and even loadlock openings, process yields can be continuously optimized for maximum business value.

"Keeping its eye on the needs of the cleanroom market, Tiger Optics has revolutionised the industry's approach to ambient air measurement," said Lisa Bergson, CEO of Tiger Optics.

"The cleanroom industry, through the Tiger-i, can better achieve maximum uptime and yield, and look forward to continued growth in the potential of CW-CRDS technology".

The Tiger-i cleanroom analyser is currently available in two platforms for optimal service, the Tiger-i 1000 and the Tiger-i 2000.

The Tiger-i 1000 HF and HCl analysers employ a split architecture that allows users to place sensor modules up to 50m away from the central analyser, and is based on the extensive success of our LaserTrace line of analysers.

The Tiger-i 2000 HF and HCl analysers provide a compact, integrated architecture for enhanced analysis with a smaller footprint, and is based on the award-winning HALO line of mini-CRDS analysers.

Tiger Optics ensures the quality of the Tiger-i line and all of its analysers through its recently announced International Organization for Standardization (ISO) 9001:2000 certification.