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Imaging performance at low voltages

Hitachi High Technologies

The SU3500 is a new type of premium VP-SEM, featuring a newly designed Ultra Variable Pressure Detector.

According to the company, the newly developed low-aberration objective lens coupled with the latest detection technology gives improvedd imaging performance, especially at low voltages.

The new electron gun and advanced image processing system provide the highest signal-to-noise ratio for good imaging clarity.

Features include:

- The newly developed Ultra Variable Pressure Detector (UVD) provides high efficiency topographical SE imaging throughout the whole voltage and pressure range, from 6-650Pa.

- The high sensitivity 5-segment BSE detector provides similarly compositional imaging.

- A live stereoscopic function provides real-time 3D sample observation, utilising high-speed automated beam tilt.

- There’s even an option for an auto-stereoscopic 3D display which means users don’t need to wear any special glasses during 3D observation.

The SU3500 joins the S-3400 and S-3700 VP-SEMs in the product range.

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