Six degree-of-freedom active cancellation system employs geophones to sense ambient building floor vibration and piezoelectric actuators to drive the payload with equal and opposite force
Since the first system was installed at the Massachusetts Institute of Technology, the TMC Stacis has become the industry standard for isolating the most vibration-sensitive instruments in noisy environments, says UK distributor Linos Photonics.
The advanced Stacis 2100 features all digital controls, improved communications, a user-friendly LCD soft menu, automatic gain adjustment, and easy installation.
Primarily designed to isolate precision microlithography, metrology, and inspection equipment in semiconductor factories, Stacis is said to be hundreds of times stiffer than air isolators and suffers from none of their limitations.
There is no soft suspension and, unlike active air systems, Stacis can be stacked (placed beneath a tool with an internal active air isolation system).
"The Stacis 2100 is compatible with all internal tool vibration isolation systems and provides the highest level of vibration isolation commercially available," said Steve Ryan, TMC vice president of marketing.
"It also enables older and noisier floors to accommodate state-of-the-art tools".
Stacis is a six degree-of-freedom active cancellation system employing geophones to sense ambient building floor vibration.
Piezoelectric actuators drive the payload with equal and opposite force cancelling vibration from 0.6 to 250Hz.
Stacis can be configured either for OEM integration or as a point-of-use vibration isolation system.
TMC is a unique blend of dual core capabilities: unparalleled expertise in precision floor vibration control and a commitment to manufacturing using advanced precision metal fabrication techniques.
In addition to Stacis, the ISO-certified company's product line includes Electro-Damp pneumatic/linear motor-based active vibration isolation systems; CleanTop II optical tables and breadboards; Gimbal Piston pneumatic vibration isolation systems; Quiet Island sub-floor platforms for cleanroom raised floors; state-of-the-art active isolators; laboratory tables; and OEM isolator designs and acoustic enclosures.
Standard and custom configurations are available.
